Welcome to the Piezoelectric and Acoustic Microelectromechanical Systems (MEMS) Laboratory at Peking University.
Our research group specializes in pioneering piezoelectric MEMS, ultrasonic transducing technologies, and intelligent microsystem integration. We are committed to advancing fundamental innovations in MEMS-based sensors, actuators, and energy-efficient transduction mechanisms through interdisciplinary design. Our efforts are dedicated to addressing critical engineering challenges across emerging application domains, including next-generation consumer electronics, industrial electronics, smart home/IoT systems, self-driving, medical devices, etc. Through synergistic collaboration with industry partners and academic institutions, we strive to bridge the gap between MEMS innovation and real-world technological implementation while cultivating future leaders in microsystems engineering.
Our Principle Investigator
Dr. Yipeng Lu
Principal Investigator
Yipeng Lu received the Ph.D. from University of California, Davis, CA, USA, in 2015. He is an Associate Professor in the School of Integrated Circuits at Peking University. Prior to joining the faculty at Peking University, Prof. Lu held research and development positions at Qualcomm Advanced Technology R&D, and a graduate student researcher position at Berkeley Sensor and Actuator Center (BSAC). His research interests include MEMS, microfabricated sensors and actuators, ultrasonics, etc. Prof. Lu serves as an Associated Editor of IEEE Transaction on UFFC, Program Committee of IEEE SFBA MEMS & Sensors Chapter 2017-2022, and Technical Program Committee of MEMS2025, Transducers 2025, IUS 2023-2025, Hilton Head Workshop 2022.
Our Research Interests
Piezo-MEMS Sensors and Micro-Systems
High Dynamic Range and Directional Acoustic Sensor
Piezoelectric acoustic sensor including high dynamic range microphone, bionic directional microphone, and partial discharge sensor, which specializes in acoustic signal measurement across low-frequency bands (20 Hz - 500 kHz). These devices are primarily employed in aeroacoustic applications, communication system noise cancellation, smart grid security monitoring and other fields to provide innovative solutions.
Miniaturized Photoacoustic System
Photoacoustic sensing provides superior vascular selectivity and reduces the need for transducer arrays compared to ultrasound imaging. The existing miniaturized systems face challenges in reducing size while maintaining sensitivity. PMUT based on MEMS technology facilitates the integration of laser, acoustic, and electrical in a small footprint system.
MEMS-based Wearable Ultrasound System
This research focuses on advancing MEMS-based ultrasound sensors and flexible packaging to develop a wearable system for continuous biological monitoring. The aim is to enable seamless, high-quality monitoring of key biological indicators in real-time, facilitating healthcare management, including home-based therapy and health monitoring. The system is designed to be compact, flexible, and easily integrated into daily life.
Piezoelectric MEMS Empowered Ultrasonic Flow Monitoring
We demonstrated real-time ultrasonic gas flow monitoring with a novel V-shaped beam pattern generated by a compact PMUT phased array based on PZT thin film. By utilizing the grating lobe produced through optimized array pitch and sequential control, this 5-channel PMUT array breaks the conventional design limitations typically associated with grating lobes, and significantly promoting the adaptation and universality of ultrasonic flow sensing. The proposed methodology enables large range flow metering with good linearity and high resolution.
Recent News
Congratulations to Yufung Gao for being honored as the Outstanding Graduate by the Beijing Municipal Commission of Education!
['Yufeng Gao is now an undergraduate research assistant in our group and will start pursuing a Ph.D. in Sept. 2025. His research interest includes the design, fabrication, and characterization of piezoelectric micromachined ultrasonic transducers (PMUTs), piezoelectric ultrasound, and PMUTs for flow sensing and neuron stimulation.', 'Yufeng was a recipient of the Outstanding Graduate in Beijing in 2025, the National Scholarship in 2023 and 2024, the Merit Student Pacesetter of Peking University in 2024, the Exceptional Award for Academic Innovation of Peking University in 2024, and the Outstanding Program Award for Undergraduate Research Training of Peking University in 2024. He was one of the first undergraduate project leaders supported by the Beijing Natural Science Foundation. He was the only Chinese undergraduate to present a paper as the first author in the 37th and 38th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2024 and IEEE MEMS 2025) held in Austin, USA, and Taiwan, China, respectively, and his work presented at MEMS 2025 was selected in the Outstanding Student Paper Finalist.', 'For more infoemation:', '---https://scholar.google.com/citations?user=uXBz9RUAAAAJ&hl=en---(Google Scholar page)', '---https://www.linkedin.com/in/yufeng-gao-7741b3335/---(LinkedIn)']...
2025-04-16 Read More
IEEE TRANSDUCER 2025 Accepted! Congratulations to all.
We're thrilled to share that 10 papers from our team have been accepted by IEEE TRANSDUCER 2025! Amo...
2025-02-20 Read More
IEEE MEMS 2025 Accepted! Congratulations to All.
We're thrilled to share that 8 papers from our team have been accepted by IEEE TRANSDUCER 2025!...
2024-10-24 Read More