2025 Publications

[1] K. Yang, L. Zhao, Y. Fang, J. Xia, B. Sheng, H. Zhang and Y. Lu , "Bone-Shape PMUTs with Enhanced Bandwidth for Doppler Blood Flow Detection", 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 243-246, Kaohsiung, Taiwan, January 19-23, 2025 .
[2] J. Gan, A. Bao, C. Yang, Y. Fang, J. Wang, J. Xia, B. Sheng and Y. Lu , "Two-Dimensional Ultrasound Imaging Using Single Transducer Pixel Based on Spatial-Spectrum Correlation Method", 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 251-254, Kaohsiung, Taiwan, January 19-23, 2025 .
[3] L. Zhao, A. Bao, C. Yang, J. Wang, X. Cao and Y. Lu , "Miniature and Wireless Ultrasonic Imaging System for Wearable Human Carotid Artery Health Monitoring", 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 480-483, Kaohsiung, Taiwan, January 19-23, 2025 .
[4] C. Zhang, Z. You, J. Xia, Y. Guo, J. Wang and Y. Lu , "An Ultrasonic Wireless Power Transmission System with High Conversion Efficiency Based on 30% ScAlN Piezoelectric MEMS Transducers", 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 783-786, Kaohsiung, Taiwan, January 19-23, 2025 .
[5] J. Xia, A. Bao, J. Wang, J. Gan, B. Sheng and Y. Lu , "Liquid Viscosity Detection Based on Harmonic Engineering and Dual-Frequency Ultrasonic Transducer Arrays", 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 813-816, Kaohsiung, Taiwan, January 19-23, 2025 .
[6] Z. You, C. Yang, L. Zhao, A. Bao and Y. Lu , "Piezoelectric Acoustic Pressure Sensors with Enhanced Sensitivity and Stiffness Based on Stress Concentration Structures and Wedge-Shape Electrodes", 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 817-820, Kaohsiung, Taiwan, January 19-23, 2025 .
[7] Y. Gao, X. Wang, L. Zhao and Y. Lu , "Real-Time Differential Ultrasonic Flow Sensing Enabled by PMUT Phased Array with a Novel V-Shaped Beam Pattern", 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1031-1034, Kaohsiung, Taiwan, January 19-23, 2025 .
[8] J. Wang, J. Xia, A. Bao, C. Yang, T. Xie, J. Gan, L. Zhao, W. Wang and Y. Lu , "Surface Inspection of Liquid and Ice Layers using a Wide-Bandwidth and Highly Directional Ultrasonic Transducer", 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1063-1066, Kaohsiung, Taiwan, January 19-23, 2025 .

2024 Publications

[1] L. Zhao, C. Yang, X. Zhang, Z. You and Y. Lu , "Broadband and High-Pressure Output PMUT Array Based on Lead-Free KNN Thin Film", 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 979-982, Austin, TX, USA, January 21-25, 2024 .
[2] Y. Gao, L. Zhao, C. Yang and Y. Lu , "Ultra-Wide Range Frequency Tuning of Piezoelectric Micromachined Ultrasonic Transducers Via Dc Bias Voltage", 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 935-938, Austin, TX, USA, January 21-25, 2024 .
[3] Y. Su, Y. Zhang, X. Yang, Y. Lu, L. Lin and X. Guo , "A Curve-Structured Flexible PMUT With Enhanced Acoustic Sensitivity", 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 939-942, Austin, TX, USA, January 21-25, 2024 .
[4] J. You, Q. Gou and Y. Lu , "Acoustic modulated passive planar lightwave circuit for quantum key distribution", Sensors and Actuators A: Physical, 382, 1, 2024.
[5] Z. You, J. Gan, C. Yang, R. Tuerhong, L. Zhao and Y. Lu , "Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film", Microsystems & Nanoengineering, 10, 1, 2024.
[6] C. Yang, L. Zhao, J. He, J. Gan, A. Bao, Z. You, Y. Gao, I. Kanno and Y. Lu , "A Wafer-Level Characterization Method of Thin Film Transverse Piezoelectric Coefficient Evaluation", Sensors and Actuators A: Physical, 378, 1, 2024.
[7] L. Zhao, J. Xia, C. Yang and Y. Lu , "Modeling and experimental studies of mutual acoustic radiation effect on PMUT array", Sensors and Actuators A: Physical, 377, 16, 2024.
[8] L. Zhao, C. Yang, X. Zhang, Z. You and Y. Lu , "Design, Fabrication, and Characterization of High-Performance PMUT Arrays Based on Potassium Sodium Niobate", Journal of Microelectromechanical Systems, 33, 4, pp. 438-445, 2024.
[9] Y. Gao, L. Zhao, C. Yang and Y. Lu , "Characterization and Optimization of PZT-Based PMUTs With Wide Range Frequency Tuning", Journal of Microelectromechanical Systems, 33, 4, pp. 427-437, 2024.

2023 Publications

[1] L. Zhao and Y. Lu , "Piezoelectric Micromachined Ultrasonic Transducers for Consumer Electronics Applications", IEEE EDTM 2023, pp. 1-3, Seoul, Korea, Republic of, March 7-10, 2023 .

Prior to 2022: Selected Publications

[1] X. Jiang, Y. Lu, H.Y. Tang, J.M. Tsai, E.J. Ng, M.J. Daneman, B.E. Boser and D.A. Horsley , "Monolithic Ultrasound Fingerprint Sensor," Microsystems & Nanoengineering - Nature, 3, pp. 17059, 2017.
[2] Q. Wang, Y. Lu, S. Mishin, Y. Oshmyansky and D.A. Horsley , "Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers," Journal of Microelectromechanical Systems, 26, pp. 1132-1139, 2017.
[3] X. Jiang, H. Tang, Y. Lu, E.J. Ng, J.M. Tsai, B.E. Boser and D.A. Horsley , "Ultrasonic Fingerprint Sensor With Transmit Beamforming Based on a PMUT Array Bonded to CMOS Circuitry," IEEE Transactions on UFFC, 64, pp. 1401-1408, 2017.
[4] Y. Lu, H. Tang, S. Fung, B.E. Boser and D.A. Horsley , "Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array with Transmit Beam-Forming," Journal of Microelectromechanical Systems, 99, pp. 1-9, 2016.
[5] H.Y. Tang, Y. Lu, X. Jiang, E.J. Ng, J.M. Tsai, D.A. Horsley and B.E. Boser , "3-D Ultrasonic Fingerprint Sensor-on-a-Chip," IEEE Journal of Solid-State Circuits, 51, 2016.
[6] H. Tang, Y. Lu, F. Assaderaghi, M. Daneman, X. Jiang, M. Lim, X. Li, E. Ng, U. Singhal, J.M. Tsai, D.A. Horsley and B.E. Boser , "3-D Ultrasonic Fingerprint Sensor on a Chip," ISSCC, 2016. (Lewis Winner Award)
[7] X. Jiang, H. Tang, Y. Lu, X. Li, J.M. Tsai, E. Ng, M. Daneman, M. Lim, F. Assaderaghi, B.E. Boser and D.A. Horsley , "Monolithic 591×438 DPI Ultrasonic Fingerprint Sensor," IEEE MEMS, 2016. (Best Paper Award)
[8] Y. Lu, H. Tang, S. Fung, Q. Wang, J.M. Tsai, M. Daneman, B.E. Boser and D.A. Horsley , "Ultrasonic Fingerprint Sensor Using a Piezoelectric Micromachined Ultrasonic Transducer Array Integrated with CMOS Electronics," Applied Physics Letters, 106, pp. 263503, 2015. (Cover)
[9] Y. Lu, H. Tang, Q. Wang, S. Fung, J.M. Tsai, M. Daneman, B.E. Boser and D.A. Horsley , "Waveguide Piezoelectric Micromachined Ultrasonic Transducer Array for Short-Range Pulse-Echo Imaging," Applied Physics Letters, 106, pp. 193506, 2015.
[10] Y. Lu and D.A. Horsley , "Modeling, Fabrication and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers," Journal of Microelectromechanical Systems, 24, pp. 1142-1149, 2015.
[11] Y. Lu, A. Heidari and D.A. Horsley , "A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers," Journal of Microelectromechanical Systems, 24, pp. 904-913, 2015.
[12] Y. Lu, H. Tang, S. Fung, B.E. Boser and D.A. Horsley , "Short-Range and High-Resolution Ultrasound Imaging Using an 8 MHz Aluminum Nitride PMUT Array," IEEE MEMS, 2015. (Best Paper Award Finalist)
[13] Y. Lu, O. Rozen, H. Tang, G.L. Smith, S. Fung, B.E. Boser, R.G. Polcawich and D.A. Horsley , "Broadband Piezoelectric Micromachined Ultrasonic Transducers Based on Dual Resonance Modes," IEEE MEMS, 2015.
[14] H. Tang, Y. Lu, S. Fung, D.A. Horsley and B.E. Boser , "Integrated Ultrasonic System for Measuring Body-Fat Composition," ISSCC, 2015.
[15] Y. Lu, Q. Wang and D.A. Horsley , "Piezoelectric Micromachined Ultrasonic Transducers with Increased Coupling Coefficient via Series Transduction," IEEE International Ultrasonics Symposium (IUS), 2015.
[16] H. Tang, Y. Lu, S. Fung, J.M. Tsai, M. Daneman, D.A. Horsley and B.E. Boser , "Pulse-Echo Ultrasonic Fingerprint Sensor on a Chip," Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015.
[17] Y. Lu, A. Heidari, S. Shelton, A. Guedes and D.A. Horsley , "High Frequency Piezoelectric Micromachined Ultrasonic Transducer Array for Intravascular Ultrasound Imaging," IEEE MEMS, 2014.
[18] Y. Lu, S. Shelton and D.A. Horsley , "High Frequency and High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers Based on Cavity SOI Wafers," Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head), 2014.
[19] Y. Lu, X. Wu, W. Zhang and W. Chen et al. , "Research on Reference Vibration for Two-axis Piezoelectric Micro-Machined Gyroscope," Journal of Micromechanics and Microengineering, 20, pp. 5039, 2010.
[20] Y. Lu, X. Wu, W. Zhang and W. Chen , "Optimization and Analysis of Novel Piezoelectric Solid Micro-Gyroscope with High Resistance to Shock," Microsystem Technologies, 16, pp. 571-584, 2010.