Advanced MEMS Fabrication Process
High Quality Piezo-MEMS Fabrication Process
Our research focuses on the advanced possesses in piezoelectric MEMS, including the fabrication of large-scale piezoelectric films such as ScAlN and PZT, high-precision patterning techniques, and advanced integration of MEMS with CMOS technology.We emphasize the growth of scandium-doped aluminum nitride (Sc0.3Al0.7N) and lead zirconate titanate (PZT) thin films, achieving enhanced piezoelectric properties through optimized crystal orientation and strain engineering. Additionally, we utilize Al-Ge eutectic bonding to integrate these films with CMOS. This approach achieves high-quality mechanical and electrical connections between CMOS and MEMS components via precisely patterned Al-Ge eutectic layers. Furthermore, we aim at a system-level solution that enables miniaturized, low-power, and high-performance piezoelectric MEMS sensing and actuation systems.
Piezo-MEMS Sensors and Micro-Systems
High Dynamic Range and Directional Acoustic Sensor
Piezoelectric acoustic sensor including high dynamic range microphone, bionic directional microphone, and partial discharge sensor, which specializes in acoustic signal measurement across low-frequency bands (20 Hz - 500 kHz). These devices are primarily employed in aeroacoustic applications, communication system noise cancellation, smart grid security monitoring and other fields to provide innovative solutions.
Miniaturized Photoacoustic System
Photoacoustic sensing provides superior vascular selectivity and reduces the need for transducer arrays compared to ultrasound imaging. The existing miniaturized systems face challenges in reducing size while maintaining sensitivity. PMUT based on MEMS technology facilitates the integration of laser, acoustic, and electrical in a small footprint system.
MEMS-based Wearable Ultrasound System
This research focuses on advancing MEMS-based ultrasound sensors and flexible packaging to develop a wearable system for continuous biological monitoring. The aim is to enable seamless, high-quality monitoring of key biological indicators in real-time, facilitating healthcare management, including home-based therapy and health monitoring. The system is designed to be compact, flexible, and easily integrated into daily life.
Piezoelectric MEMS Empowered Ultrasonic Flow Monitoring
We demonstrated real-time ultrasonic gas flow monitoring with a novel V-shaped beam pattern generated by a compact PMUT phased array based on PZT thin film. By utilizing the grating lobe produced through optimized array pitch and sequential control, this 5-channel PMUT array breaks the conventional design limitations typically associated with grating lobes, and significantly promoting the adaptation and universality of ultrasonic flow sensing. The proposed methodology enables large range flow metering with good linearity and high resolution.
